Acquisition et mise en service d’un équipement ALD pour les films avancés métalliques et nitrures métalliques pour le CEA de GRENOBLE

TENDER DESCRIPTION

As part of its research activities aimed at developing fully depleted SOI technologies of 10 nm and beyond, CEA-LETI wishes to acquire a fully automatic atomic layer deposition (ALD) equipment. This equipment will primarily process 300 mm wafers (or 200 mm wafers using 200-300 mm carriers). It is intended for the deposition of metals as well as metal nitrides for non-volatile memories and advanced contacts. This equipment must also include a cleaning solution to improve surface quality prior to the deposition of metals and metal nitrides. The contract also includes the following mandatory priced option:* - Option 1 – Level 1 Maintenance Training (Chapter 9) The contract also includes the following optional priced options:* - Option 2 – Heat exchangers and cooling systems (chillers) (Section 3.2.6) - Option 3 – Power supply transformer (Section 4.1.4) - Option 4 – Advanced Maintenance Training (Chapter 9) - Option 5 – Preventive, corrective maintenance services and necessary spare parts (Section 12.2) - Option 6 – Extension of warranty for one additional year - The price includes transport and insurance, according to DAP CEA Grenoble conditions (Incoterms ICC 2020 Convention) As…

TENDER BRIEF

TENDER DOCUMENTS