Equipement d'inspection optique automatique 300mm

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For its research activities aimed at developing FD-SOI 10 nm technologies and beyond, CEA-LETI wishes to acquire a 300mm equipment for front-side optical inspection, capable of detecting defects with a minimum size of 300nm for microscopic inspection, and defect sizes greater than 10µm for macroscopic inspection. The equipment shall be equipped with multiple optical lenses and shall be able to process wafers of 200mm and 300mm with variable thickness. It shall be able to process files in the specific KLARF format and enable review and defect classification. The contract includes: - The base equipment, - Optional priced options: Option 1: Hardware configuration capable of processing transparent wafers Option 2: Electrical transformer Option 3: Level 1 maintenance training Option 4: Advanced level maintenance training Option 5: Warranty extension (additional 1 year) For its research activities aimed at developing FD-SOI 10 nm technologies and beyond, CEA-LETI wishes to acquire a 300mm equipment for front-side optical inspection, capable of detecting defects with a minimum size of 300nm for microscopic inspection, and defect sizes greater than 10µm for macroscopic inspection. The…

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