Erneuerung und Erweiterung einer MOVPE-Anlage für III-Nitrid und 2D-Halbleiter

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1. General description: The University of Duisburg-Essen researches materials, semiconductor technologies, and module integration for applications in high-frequency electronics and in optoelectronics. To carry out the research work, a continuous process line is operated in a cleanroom up to class 5 (ISO 14644-1). For the production of III-nitride semiconductor components, the existing system for metal-organic vapor phase epitaxy (MOVPE) from the company Aixtron (serial number CS17580) must be partially renovated and extended for current and upcoming research projects. The following components are to be renovated: - The process pump - The showerhead gas inlet - 4x non-return valves The extension includes lines for the source materials triethylborane and ethene, which must be integrated into the system. For each material, corresponding work on the gas supply system (English: gas panel) must be carried out. The materials are fed into the reactor in a controlled manner by appropriate flow and pressure regulators (detailed in the technical description). The full description is to be found in the performance specification. 1. General description: The University of Duisburg-Essen…

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