Fourniture d’un systeme de lithographie electronique

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The services covered by this consultation include: -The supply of the Equipment, including factory controls and tests, -Packaging and delivery to the CEA premises, -Installation and commissioning of the Equipment at the CEA premises, -On-site checks and tests, -The supply of all documents required for operating, maintaining and servicing the Equipment, -Training in the use of the Equipment, -The warranty for the Equipment (including the supply and replacement, if necessary, of the filament and a preventive maintenance visit) for a period of one year from acceptance, -The maintenance of the Equipment for a period of 3 years from the end of the warranty period, including an annual preventive maintenance visit, updates to the Equipment control software, telephone support, and the supply and replacement, if necessary, of the filament. The options are as follows: -Option 1: supply of the proximity effect correction software and advanced pattern preparation -Option 2: supply and installation of a thermal regulation device o2.a: 1-year warranty for the thermal regulation device o2.b: 3-year maintenance for the thermal regulation device (as defined in the firm tranche) o2.c: 3-year…

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