Reaktives Ionenätzen

TENDER DESCRIPTION

For the projects currently being carried out at the chair, the fabrication of free-standing waveguides by means of "Faraday Cage Etching" is central. This complex process requires two completely different etching regimes in the same chamber. Accordingly, decoupled plasma density and ion energy (for p-i-n diode integration) are required. Further research projects require active helium backside cooling (for nanophotonic waveguides) in order to prevent the electron-beam resist (E-beam resist) from "flowing" or burning. For additional projects as well as for the post-processing of FIB-implanted defects, the preservation of crystal quality is of utmost priority. High-energy ion bombardment would damage the lattice and destroy the optical coherence of the color centers. Of particular importance is the gentle removal of surface layers ("Soft Etch"), without introducing new defects deep into the crystal. Ultimately, for the structuring of Solid Immersion Lenses (SILs) in diamond, a pure oxygen plasma is required, while SiC requires a fluorine chemistry (SF₆/CHF₃). Accordingly, a gas box with at least 5 lines for fluorine and oxygen processes is necessary in order to process both…

TENDER BRIEF

TENDER DOCUMENTS